JXA-iSP100 (EPMA)
MAX 10 (EDS)
xClent (CL)
JSM-IT500 (SEM)
Max 170 (EDS)
Symmetry (EBSD)
GeoLas HD
Agilent 7900
Ion sources: gas + solid
Energy range: 0-70 kev
Temperature: -170ºC – 500 ºC
Alpha300 R
VERTEX 70v
Lambda 950